| 摘要 |
A rotary microactuator includes a plurality of stationary electrodes formed on a substrate, an electrically conducting bottom layer formed on the substrate that is electrically isolated from the stationary electrodes, a plurality of movable electrode, and an electrically conducting top layer attached to the movable electrodes. The top layer is electrically connected to the bottom layer, the movable electrodes, and to a signal common that is preferably a ground potential. The top layer prevents vibration modes of the microactuator caused by vibrations of individual electrodes of the plurality of movable electrodes. The top layer, the bottom layer and the movable electrodes surround the stationary electrodes and contain an electric field generated between the stationary electrodes and the movable electrodes. An edge structure is formed on the substrate surrounding the plurality of stationary electrodes, and is electrically connected to the top layer, the bottom layer and the plurality of movable electrodes.
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