Solid-state chemical sensor

摘要

The invention pertains to a solid-state chemical sensor with a substrate support. On one side of the support is mounted a heating element with branch circuit connections. On the other side interdigital electrodes are arranged and thereon a carbon dioxide-sensitive material, which comprises CuO and TiO3, as well as additional metal oxides, in the form of a thick film of approximately 20-200 mu m.