| 摘要 |
PROBLEM TO BE SOLVED: To surely house a wafer into a cassette. SOLUTION: Concerning a housing device for wafer for moving down a wafer 10 along with a slope 22, on which a liquid flows, and housing the wafer in a housing part 32 located in the liquid under the slope 22, at a lower end part 23 of the slope 22, a flood part 25a and a light receiving part 25b are provided while facing each other and a transmission type sensor device 25 is provided for detecting the passage of the wafer 10 by shielding light flooded from the flood part 25a. |
