| 摘要 |
A gas flow sensor particularly useful for the measurement of relatively low flow rates. The sensor includes a flexible vane affixed to a substrate. One end of the vane is conductive and is permitted to move with the flexing of the vane. That end of the vane forms part of one or more capacitors such that as the vane bends with the flow of gas therethrough, the capacitive value changes. The gas flow rate can then be determined using well-known circuitry. The vane includes a flow-restriction section to allow the gas to flow through. The vane is designed of a material and a configuration to ensure that it bends under very low flow conditions.
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