| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for peeling an end face film, which is for removing a coating film applied to a rectangular substrate by a spinner and including beads in an end face of a rim part, capable of peeling the film within a short time, lessening the use amount of the solution for peeling the film on the end face, and preventing the solution from leaking in the direction toward the center part of the substrate. SOLUTION: The nozzle 2 for jetting a solution for peeling a film on the end face and built in an end-face-film peeling apparatus 1 jets out the solution toward the front of a running substrate 10, in which the film is required to be peeled, parallel to the side 10b of the circumferential rim part end face 10a of a substrate 10, and slantingly downward at about 45&oα2 or within an angleα1 of 40 deg. to the 10b side of the circumferential rim part end face 10a and slantingly downward at about 45 deg.α2 . Further, the apparatus 1 comprises an air curtain 70 vertical to the substrate 10 at a position parallel to the side 10b of the substrate circumferential rim part end face 10a and slightly inner side to the substrate than the nozzle 2 for jetting solution for peeling a film on the end face. |
