METHOD FOR REMOVING RESIST MATERIAL

摘要

PROBLEM TO BE SOLVED: To strip a resist material on an article and to remove it for certain by using an adhesive sheet or the like irrespective of the property and state of the resist material. SOLUTION: This resist material on an article is removed by applying an adhesive sheet or the like to the upper surface of the article and stripping both the adhesive sheet and the resist material in one body. At that time, a stress application treatment for causing stress is applied to an interface between the resist material and the article by contraction or expansion of the adhesive sheet.