Semiconductor test apparatus for measuring power supply current of semiconductor device

摘要

A power supply voltage (Vcc) is applied to a dummy capacitor having a capacitance identical to that of a bypass capacitor to generate an excessive current. The excessive current is subtracted from a current flowing through an IC and the bypass capacitor to obtain a power supply current (Icc) of the IC. The time required for measuring power supply current (Icc) of the IC is reduced since it is not necessary to wait for attenuation of the excessive current of the bypass capacitor.