发明名称 Low cost hermetic sealed microwave module packaging
摘要 The invention relates to a method for producing low cost hermetic Integrated Module Assembly (IMA) packaging, where an aluminum coating (24) is deposited on a poly-tetrafluoral-ethaline substrate (20), the aluminum coating (24) is selectively etched to form a waveguide window (26) and the substrate (20) is selectively treated over the waveguide window (26) to produce a non-conductive hermetic seal. The substrate (20) is then joined to a metal carrier (28) containing the waveguide (30). As a result of using selectively treated low cost substrates to produce hermetic seals, more expensive substrates are not required to form hermetic seals over substrate to waveguide interconnections.
申请公布号 US5956840(A) 申请公布日期 1999.09.28
申请号 US19970971155 申请日期 1997.11.14
申请人 TRW INC. 发明人 CHAN, STEVEN S.;DOWSING, III, JOHN E.;SNODGRESS, JASON E.
分类号 H01L23/12;H01L23/66;H01P1/08;H01P11/00;(IPC1-7):H01P11/00 主分类号 H01L23/12
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