| 摘要 |
PROBLEM TO BE SOLVED: To provide a rotational vibration type angular velocity sensor and its manufacturing method, enabling the whole body to be downsized, capable of detecting angular velocity with high accuracy, and enabling a vibrator to be vacuum-sealed easily. SOLUTION: In a rotational vibration type angular velocity sensor 10, two glass substrates 11, 12 disposed opposite to each other and a silicon frame 20 disposed between the glass substrates 11, 12 form a three-layer structure. An annular vibrator weight 21 supported via T-shaped support beams 22 by a base 23 in a hollow part is formed in the silicon frame 20, and comb teeth-like electrodes 11a1, 12a1 for electrostatic actuation and electrodes 11a2, 12a2 for capacitance detection are formed on inner surfaces of the respective glass substrates 11, 12. The T-shaped support beams 22 are vertically symmetrical about the vibrator and formed into T-shapes extending from their fixed parts in directions opposite to each other and extending from their ends in both lateral directions. |
