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发明名称
ION IMPLANTING SUBSTRATE HOLDING DEVICE AND ION IMPLANTING DEVICE
摘要
申请公布号
JPH11265681(A)
申请公布日期
1999.09.28
申请号
JP19980088002
申请日期
1998.03.17
申请人
EBARA CORP
发明人
TAMAI TADAMOTO
分类号
H01J37/20;H01J37/317;(IPC1-7):H01J37/317
主分类号
H01J37/20
代理机构
代理人
主权项
地址
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