| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate delivery device which is small in size, compact and capable of surely delivering substrates of various lengths in a magazine to a transfer path. SOLUTION: A substrate 1 located in a magazine is pushed slightly forward by the a 7 of a pusher 6 which is located in the rear of the substrate 1. Then, the tip of the substrate 1 is slipped in between rollers 14 and 15. Then the roller 15 starts rotating, and the substrate 1 is sent to a transfer path by the rollers 14 and 15. When the rear edge of the substrate 1 is detected by a sensor 20, a motor 16 stops driving. Since the substrate 1 only needs to be pushed slightly forward from the magazine by the pusher 6, and the pusher 6 which is small and has a short stroke is able to surely send substrates 1 of various lengths to a transfer path. |
