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发明名称
WIRING METHOD OF SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH11265940(A)
申请公布日期
1999.09.28
申请号
JP19980066380
申请日期
1998.03.17
申请人
TOSHIBA CORP
发明人
UEDA TOSHIAKI
分类号
G06F17/50;H01L21/82;(IPC1-7):H01L21/82
主分类号
G06F17/50
代理机构
代理人
主权项
地址
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