| 摘要 |
The invention relates to a production facility for integrated circuits, comprising: at least one cleanroom, in which processing means for processing raw materials like wafers into integrated circuits have been located; and associated equipment for said cleanroom and the processing means located therein, characterized in that: the production facility is divided into mutually separated process cells, separated by walls; each process cell comprises a cleanroom; each cleanroom is equipped with processing means for executing processes requiring substantially similar conditions; each process cell comprises associated equipment for said cleanroom in the same process cell; and the associated equipment in said process cell is dedicated for maintaining the conditions required for the process equipment in said cleanroom. The features of the invention lead to a facility, in which the local processing and environmental conditions are optimised to local needs. In addition the realisation period of the production facility is significantly reduced. |
