发明名称
摘要 <p>PURPOSE:To reduce a loss of a measuring time by disposing a plurality of measuring elements in appropriate arrangement, by accommodating a plurality of bodies to be measured in an accommodating element being common to the measuring elements and by conveying each of these bodies in and out of a desired one of measuring elements by a conveying means. CONSTITUTION:One wafer 1 is taken out of a common cassette 4 accommodating a plurality of wafers 1 and is put on a delivering mechanism 9 by driving and controlling a conveying means 6 on a conveyance route 5 according to a program set beforehand, and prealignment of the wafer on the basis of the orientation flat is conducted. Next, the wafer on the delivering mechanism 9 is taken up by a pincette 8 on one side, while a wafer already inspected is put on the delivering mechanism 9. Thereafter the conveying means 6 is moved and conveyance is made to a measuring element 2 determined beforehand. At this measuring element 2, a wafer already measured is taken out and a wafer not yet measured is conveyed thereinto. After fine position alignment is executed, the measuring element 2 executes measurement. Another wafer 1 taken out by the conveying means 6 is conveyed to a desired measuring body 2 and measured through the same process. In this way, the wafers 1 in the cassette 4 are conveyed one by one sequentially and measured. According to this constitution, the rate of operation of a plurality of probe devices can be improved.</p>
申请公布号 JP2952331(B2) 申请公布日期 1999.09.27
申请号 JP19900091171 申请日期 1990.04.05
申请人 TOKYO EREKUTORON KK 发明人 KARASAWA WATARU
分类号 G06F9/445;G01R31/26;G01R31/28;H01L21/66;H01L21/677;H01L21/68;(IPC1-7):H01L21/66 主分类号 G06F9/445
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