摘要 |
<p>PURPOSE:To reduce a loss of a measuring time by disposing a plurality of measuring elements in appropriate arrangement, by accommodating a plurality of bodies to be measured in an accommodating element being common to the measuring elements and by conveying each of these bodies in and out of a desired one of measuring elements by a conveying means. CONSTITUTION:One wafer 1 is taken out of a common cassette 4 accommodating a plurality of wafers 1 and is put on a delivering mechanism 9 by driving and controlling a conveying means 6 on a conveyance route 5 according to a program set beforehand, and prealignment of the wafer on the basis of the orientation flat is conducted. Next, the wafer on the delivering mechanism 9 is taken up by a pincette 8 on one side, while a wafer already inspected is put on the delivering mechanism 9. Thereafter the conveying means 6 is moved and conveyance is made to a measuring element 2 determined beforehand. At this measuring element 2, a wafer already measured is taken out and a wafer not yet measured is conveyed thereinto. After fine position alignment is executed, the measuring element 2 executes measurement. Another wafer 1 taken out by the conveying means 6 is conveyed to a desired measuring body 2 and measured through the same process. In this way, the wafers 1 in the cassette 4 are conveyed one by one sequentially and measured. According to this constitution, the rate of operation of a plurality of probe devices can be improved.</p> |