| 摘要 |
<p>PURPOSE:To enable end point detection in metal layer patterning to be executed by patterning on a metal pattern formed electrically independent of the metal layer for forming a nonpenetration part of X-ray and measuring the conductance of electricity sent in the metal pattern. CONSTITUTION:On both ends of a metal pattern 7, electric contacts 6 are provided. By connecting the contacts 6 through a lead wire to a constant voltage power source E installed outside a chamber of a miling device and a current detector A, simultaneously an X-ray zone plate element 8 is irradiated with an energy beam. If electric current is sent on the pattern 7 during a patterning, the measuring current value decreases with time because of the elimination of the pattern 7. Finally at the completion of the elimination of the metal 2 on the exposed part of the pattern, the current becomes zero and the elimination of the part irradiated with the energy beam in a ring pattern 5 also completes. Therefore, zero measurement of the current indicates the end of patterning and so the monitoring of the current enables exact patterning end point detection.</p> |
