| 摘要 |
PROBLEM TO BE SOLVED: To make electron density of plasma on a wafer surface of large area by exciting resonance conductors of specified lengths arranged by an even number symmetrically toward a center from an outer conductor of a cylindrical pipe connected with a plasma chamber by impression of high frequency power. SOLUTION: Bar-shaped resonance conductors of an even number which are symmetrically provided in a radial direction from a cylindrical outer conductor 2 have about 1/4 wavelength of a high frequency to be used. By an action of electromagnetic field generated by resonance current flowing in adjacent resonance conductors 3 which resonate each other, induction current is flowed in the adjacent resonance conductors 3 and the directions 6 of current in the adjacent resonance conductors 3 become opposite. In space 4 between the resonance conductors 3, magnetic field which is alternately generated in opposite directions is added and becomes strong. High frequency power to the resonance conductors 3 is impressed, gas for plasma is introduced into lower plasma generation space which is isolated from the cylindrical outer conductor 2 by an insulating plate for vacuum seal and plasma is generated. To closely couple with strong magnetic field, plasma becomes easy in excitation and the electron density becomes uniformly high. |
