Method of fabricating a capacitor on a rugged stacked oxide layer

摘要

The present invention relates to a stacked memory capacitor of a DRAM cell, particularly, relates to a DRAM cell having a memory capacitor whose storage electrode possesses a remarkably increase area without increasing its occupation area and the complexity of fabrication thereof. By disposing the storage electrode of the memory capacitor on a rugged stacked oxide layer, the area of the storage electrode is remarkably enlarged since the growing of the storage electrode made of a doped polysilicon layer is followed along the topography of the rugged stacked oxide layer, thereby, resulting in a rugged surface thereof. The entire rugged surface of the storage electrode is covered with a dielectric layer to form a plate electrode made of a doped polysilicon layer. The memory capacitor provided by the invention achieves a higher capacitance while maintaining the same occupation area and packing density as that of the conventional arts.