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发明名称
FABRICATION OF STOICHIOMETRIC INSB III-V COMPOUND SEMICONDUCTOR
摘要
申请公布号
KR20060034546(A)
申请公布日期
2006.04.24
申请号
KR20040083711
申请日期
2004.10.19
申请人
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
发明人
LEE, KWAN HYI;JEUNG, WON YOUNG;LEE, JONG YUP
分类号
H01L21/288
主分类号
H01L21/288
代理机构
代理人
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