| 摘要 |
PROBLEM TO BE SOLVED: To reulate an optical system with excellent reproducibility in an actual using state or a state corresponding to that. SOLUTION: In this regulating method, an image of a phase pattern 4 having at least one projected part T and one recessed part B is focused by an inspected optical system 3, and a distanceΔx between the image focusing position XT of a light quantity tilting part on a projected side and an image focusing position XB of the light quantity tilting part on a recessed side is obtained about the position XE of the extreme value IE of a light quantity I produced in a boundary E between the image of the projected part T and the image of the recessed part B in the phase pattern 4, and then the distanceΔX is obtained in a plurality of states where the defocused quantityΔZ of an image in the phase pattern 4 is mutually different, and the optical regulation of the inspected optical system 3 is carried out on a relation between the defocused quantityΔZ and the distanceΔX. |
