| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring method, for a sample shape by using a scanning probe microscope, which can obtain a precise sample shape image in which the measuring error of the portion of a probe thickness is not superposed on an uneven part. SOLUTION: A probe 14 is formed of a thin-film material, and a sharp part 14a is formed at its tip. The step amount (h) and the gradeθof irregularities in an AFM image obtained by using the probe 14 are computed, and they are compared with a reference step amount (h1) and a reference gradeθ1 which are set by the shape of the tip part 14a. When it is judged that the measuring error of the portion T of a probe thickness is superposed on the uneven part, the slope shape image of the irregularities is moved in parallel to a scanning direction. In addition, the probe thickness T is found by measuring the thickness of the thin-film material before the probe 14 is formed.
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