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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH11260922(A)
申请公布日期
1999.09.24
申请号
JP19980062887
申请日期
1998.03.13
申请人
TOSHIBA CORP
发明人
SUDO AKIRA
分类号
H01L21/82;(IPC1-7):H01L21/82
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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