INSPECTION APPARATUS FOR SEMICONDUCTOR INTEGRATED CIRCUIT AND ITS TEST METHOD,申请号JP19980057211-传众专利搜索

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发明名称	INSPECTION APPARATUS FOR SEMICONDUCTOR INTEGRATED CIRCUIT AND ITS TEST METHOD
摘要
申请公布号	JPH11258312(A)	申请公布日期	1999.09.24
申请号	JP19980057211	申请日期	1998.03.09
申请人	SEIKO EPSON CORP	发明人	IIDA KATSUYA
分类号	G01R31/316;(IPC1-7):G01R31/316	主分类号	G01R31/316
代理机构		代理人
主权项
地址

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