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发明名称
METHOD OF INSPECTING MASK DETECTS
摘要
申请公布号
KR20060060265(A)
申请公布日期
2006.06.05
申请号
KR20040099200
申请日期
2004.11.30
申请人
ALLIED INTEGRATED PATTERNING CORP.
发明人
HO MING FENG;CHANG I WEN
分类号
H01L21/66;H01L21/027
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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