摘要 |
<p>PROBLEM TO BE SOLVED: To treat protrusions on a hole injection electrode and thereby prevent leakage current and dark sports from occurring by forming a auxiliary electrode layer on the hole injection electrode formed on a substrate and then treating the hole injection electrode selectively by an etchant. SOLUTION: A hole injection electrode 2 such as ITO formed on a substrate 1 in the form of a film has protrusions having various sizes. An auxiliary electrode layer 3 is formed on the hole injection electrode 2 in a thickness of approximately 10-20 nm. The protrusions of the hole injection electrode having a height larger than the film thickness of the auxiliary electrode layer 3 are exposed outside from the surface of the auxiliary electrode layer 3. For the substrate 1, the hole injection electrode 2 is selectively treated by an etchant and thus, the exposed protrusions are etched. Although holes are formed at those parts, the organic layer formed on the hole injection electrode 2 intrudes into the parts of pin holes 4, so that no problem happens as long as the size of the pin hole is less than approximately 10μm in diameter.</p> |