OBJECT FOR MANUFACTURING LINE CLEANING, WASHING METHOD OF OBJECT FOR MANUFACTURING LINE CLEANING AND OPERATION METHOD OF MANUFACTURING LINE

摘要

PROBLEM TO BE SOLVED: To prevent attaching of fine particle to a wafer even if a manufacturing line is used for a long period or a large quantity of fine particle is suddenly generated, by carrying out an object with charging property together with an object in a manufacturing process by a carrying part. SOLUTION: A dummy cassette 21 with charging property is formed of polypropylene of surface specific resistance value of 10<12>Ωor more. The dummy cassette 21 with charging property is made to flow between conductive wafer cassettes 10 which carry a product wafer. Then, the dummy cassette 21 with charging property electrically attracts floating matter and fine particle existing on a manufacturing line 1 by electrostatic attraction force thereof. Meanwhile, the conductive wafer cassette 10 does not attract floating matter and fine particle existing on the manufacturing line 1 electrically. As a result, it is possible to prevent attaching of fine particle to a wafer even if a manufacturing line is used for a long period or a large quantity of fine particle is suddenly generated.