| 摘要 |
<p>PROBLEM TO BE SOLVED: To surely detect a wafer in a cassette with a small occupying space. SOLUTION: This apparatus comprises a laser sensor disposed on side faces 54A, 56A of a cassette chamber so as to projects a laser beam 103 in parallel with a slot of a cassette 20 to confirm the existence of a wafer 10, based on the existence of a reflected beam 103B passing through the slot, a light beam inlet/outlet acrylic box 122 for introducing the laser beam 103A from the laser sensor 100 into cassette chambers 54, 56, including a mirror 130 for guiding a reflected laser beam 103B in the cassette chambers 54, 56 to the laser beam sensor 100, and a reflecting plate 120 disposed opposite to the acrylic box 122 across the slot in the cassette chambers 54, 56.</p> |
