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发明名称
NON-DESTRUCTIVE TESTING DEVICE
摘要
申请公布号
JPH11260870(A)
申请公布日期
1999.09.24
申请号
JP19980060051
申请日期
1998.03.11
申请人
SONY CORP
发明人
TOKUMARU KAZUMI
分类号
G01B7/06;G01N27/00;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01B7/06
代理机构
代理人
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