| 摘要 |
PROBLEM TO BE SOLVED: To obtain a new stripper for a positive type resist excellent in removing performance and not corroding metallic materials such as aluminum and copper by incorporating a specified compd. and pyrocatechol. SOLUTION: The stripper contains at least one nitrogen-contg. org. hydroxy compd. selected from N-hydroxyalkyl substd. amines and nitrogen-contg. heterocyclic hydroxy compds. and pyrocatechol or further contains a water-soluble org. solvent. The substd. amines and the heterocyclic hydroxy compds. include monoethanolamine, N-hyclroxyethylpiperazine and 1-(2-hydroxyethyl)-2- pyrrolidone. The water-soluble org. solvent is not particularly limited if it is an org. solvent having water solubility but at least one selected from N- methyl-2-pyrrolidone, dimethylimidazolidinone, etc., is preferably used. |
