| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas clean-up device which can prolong the service life of a filter media by detecting the clogging of the filter media and removing the clogging. SOLUTION: A gas clean-up device 10 for a gas laser, which cleans a laser gas in a laser chamber 1 by removing impurities 18 contained in the laser gas is provided with filter media 7, which are inclined by a prescribed angleθwith respect to the direction of a gas flow 11 and a trapping means which captures impurities 18A that collide with the filter media 7 and are rebounded from the media 7. Alternatively, the device 10 is also provided with a wall which cuts the filter media 7 longitudinally in the direction of gravity on the incident plane of the media 7, through which the laser gas is made incident into the media 7 and a means which detects the clogging of the filter media 7. In addition, the device 10 is also provided with a means which pressurizes a space on the downstream side of the filter media 7 is the direction of the gas flow 11.
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