摘要 |
PROBLEM TO BE SOLVED: To accurately measure the thickness or refractive index of a transparent work such as glass, without contacting and without depending on the inclination angle of the transparent work. SOLUTION: A projector radiates a conical converged light. When a left light beam b is incident on a transparent work 1 at an incident angleθ1 -θa , it refracts at a refraction angleθd . When coming to the back side of the transparent work 1, it again refracts into a light beam d with a deviation 1d occurring between the light beams b and d. About a right light beam a, a deviation 1c occurs. From these deviations an elliptic profile is obtd. at a light receiving position. By quantitatively analyzing the optical axis change and light receiving profile, the inclination angleθ1 and thickness T of the transparent work 1 can be measured if the transparent work's refractive index is known.
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