| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a substrate marking method, substrate inspecting method, and substrate inspecting device used for this, in which the efficiency of a defective confirming work and the improvement of an activity ratio through automatic alignment can be attained, and the defective information of a substrate without pattern can be used for the following processes. SOLUTION: This method inspects the defects of a glass substrate 9, and includes a process for marking the surface of a glass substrate 9 by the use of a laser (a), a process for aligning the glass substrate 9 by the use of a mark applied by the marking (b), and a process for inspecting the defects of the glass substrate 9.</p> |
