| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray aligner which is capable of controlling an incident position and an incident angle for an X-ray reflecting mirror of X-rays. SOLUTION: A thermal removal filter 3 composed of thin-film diamond, in which a mirror surface is polished is arranged between a light source and an X-ray reflecting mirror. SR lights 1 emitted from the light source are divided into X-rays 6a and visible lights 5 by the thermal removal filter 3, and the visible lights 5 are further divided into transmitted lights 5a and reflected lights 5b by a half-mirror 9 and detected by visible lights detectors 7a, 7b. Displacement distances X, Y of the light source and a displacement angle for basic axis are calculated from the detected data, and based on these, a position of an X-ray reflecting mirror 2 is corrected by an X-ray reflecting mirror controller, 8 whereby the X-rays are controlled such that the X-rays are incident at a regular incident position and at a regular incident angle. |
