| 摘要 |
PROBLEM TO BE SOLVED: To evaluate the edge roughness of a pattern quantitatively. SOLUTION: Two reference points are selected from an evaluating pattern. Next, the interval between the selected two reference points is divided into one-hundred equal parts, and a one-hundred measuring points are set. Next, each measuring point is scanned by an electronic beam (S1), and a plurality of secondary electronic waveform data obtained are stored respectively (S2). These two-dimensional electronic waveform data are transformed into position coordinates (S3), and a cumulated waveform is obtained by superposition computation processing (S4). Attension is paid to the position of one out of the two peaks of the cumulated waveform, and a waveform larger than some threshold value of the waveform is approximated by a normal distribution function, and edge roughness evaluation is performed fromσ-value. |
