| 摘要 |
PROBLEM TO BE SOLVED: To reduce the capacity and size of electric power supply equipment, by ON/OFF controlling a plurality of electric power service systems with time sharing. SOLUTION: Before temperature control, AC 100 V is continuously applied to respective tape heaters 14A, 14B, 14C separately wound around a processing gas supply pipe 6. The respective required times for heating a substance by respective heaters from normal temperature to a target temperature 100 deg.C are predetermined. When the required time of the tape heater 14A is taken as T, for example, which conducts the most rapid temperature rise, and the required times of the tape heaters 14B, 14C are taken as 2T, 3T, it is assumed that it takes two times and three times as many as that of the 14A. The data of the respective required times are incorporated into an ON/OFF control part 32 as a program so as to ON/OFF control electric power service systems based on the data. It is thus possible to supply electric power to two or more electric power service systems with time sharing so as not to become an ON condition, thus it is possible to reduce the capacity and size of electric power supply equipment. |
