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经营范围
发明名称
SUBSTRATE CLEANING EQUIPMENT
摘要
申请公布号
JPH11260782(A)
申请公布日期
1999.09.24
申请号
JP19980057166
申请日期
1998.03.09
申请人
OKI ELECTRIC IND CO LTD
发明人
UEKI KOJI;OSAKO TAKASHI
分类号
B08B1/04;B08B7/04;H01L21/00;H01L21/304;(IPC1-7):H01L21/304
主分类号
B08B1/04
代理机构
代理人
主权项
地址
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