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发明名称
MANUFACTURE OF SEMICONDUCTOR
摘要
申请公布号
JPH11260816(A)
申请公布日期
1999.09.24
申请号
JP19980065219
申请日期
1998.03.16
申请人
TOSHIBA CORP
发明人
YAMASHITA ATSUKO
分类号
H01L21/3205;(IPC1-7):H01L21/320
主分类号
H01L21/3205
代理机构
代理人
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