| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a sample to be chucked for evaluation of an electrostatic chuck. SOLUTION: For a body to be chucked 1 by an electrostatic chuck, at least a part of a chucking fast of the body 1 is made of a conductor 2 such as silicon wafers, a means is provided for jetting compressed gas on the chucking face of the electrostatic chuck. As the compressed gas jetting means, a porous body 3 is mounted on the outside of the conductor 2, by constituting the body to be chucked and a gas jetting face of the porous body 3 is exposed on the chucked face, to make it capable of embodying.</p> |
