| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a stress measuring method whose resolution is high in the depth direction of a sample and in which the large penetration depth of X-rays is obtained and to obtain its apparatus. SOLUTION: In a stress measuring method and an apparatus 1 which executes the method, diffracted X-rays D from the inside of a sample S are detected by a concentration method, and a stress inside the sample S is measured. In this case, X-rays B from an X-ray source 11 are condensed on a focus circle C which is situated along a plane crossing the surface of the sample S and which passes the center position S0 of a measuring place inside the sample S. The sample S is irradiated with the X-rays B which are passed through their condensed place F. An R-ray detector 13 which is provided with a monochromator is scanned near the diffraction angleθof the sample S with reference to the irradiated X-rays B. The diffracted X-rays of a crysal on the focus circle C which passes the center position S0 of the measuring place are detected.</p> |
