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发明名称
CHARGED PARTICLE BEAM DEVICE
摘要
申请公布号
JPH11260297(A)
申请公布日期
1999.09.24
申请号
JP19980061585
申请日期
1998.03.12
申请人
JEOL LTD
发明人
KOMATSUBARA TAKAO
分类号
H01J37/16;H01J37/18;(IPC1-7):H01J37/16
主分类号
H01J37/16
代理机构
代理人
主权项
地址
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