| 摘要 |
The arrangement uses electro-optics to irradiate a sample with a beam of charged particles. A processor controls movement of the stage carrying the object. The device has a sample holder (8), a drive unit for the sample holder, a detector, to measure the sample holder displacement, and an optical unit (1,3-6) to radiate the sample with charged particles (2). An imaging device (22), displays a picture using charged particles or reflected radiation. A display unit (20) displays a marking of each target position in the sample picture that is displayed on the imaging device, and is controlled using an input device (27) and a computer (19). When the sample holder moves, the marking on the display also moves according to the calculated position, and the detected displacement of the sample holder.
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