发明名称 USING DUV CURING TO FORM A PROTECTIVE COATING FOR COLOR FILTERS
摘要 <p>A structure and method for producing color filters (312) with a protective highly cross-linked and densified polymer layer (320) is described. In one embodiment, each filter (312) is coated with a highly cross-linked and densified polymer layer (320) to prevent bleeding of material between closely spaced filters during the fabrication process. In a second embodiment, the highly cross-linked and densified polymer layer is used to protect an array of filters from physical damage during detaping operations. In a third embodiment, the highly cross-linked and densified polymer layer is used before fabrication later filters in a color filter array to prevent damage to previous filter layers.</p>
申请公布号 WO1999047900(A1) 申请公布日期 1999.09.23
申请号 US1999004434 申请日期 1999.02.26
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