| 摘要 |
PROBLEM TO BE SOLVED: To maintain a position of a board carrying robot accurately by minimizing strain of a board carrying chamber, by constituting a supporting frame of a part which directly supports a board carrying chamber and a part which directly supports a board carrying robot independently from the former part. SOLUTION: A supporting frame 40 connected to a carrying chamber 18 comprises a fixing arm 42, and the fixing arm 42 supports a board carrying robot 32 independently. That is, an outside part of the supporting frame 40 supports the carrying chamber 18 and an inside part of the supporting frame 40, that is, the fixing arm 42 supports the board carrying robot 32 independently. The board carrying robot 32 is subjected to teaching about a position of a processing chamber under atmospheric pressure. During usual non-teaching operation, strain is generated in a bottom part wall 20 of the carrying chamber 18 since the carrying chamber 18 is evacuated; however, strain of the board carrying robot 32 to the supporting frame 40 is not generated. |
