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发明名称
Ionenquelle
摘要
申请公布号
DE59602769(D1)
申请公布日期
1999.09.23
申请号
DE1996502769
申请日期
1996.05.11
申请人
VTD VAKUUMTECHNIK DRESDEN GMBH
发明人
FALZ, MICHAEL;WILBERG, RUEDIGER;SUPRJANOVITSCH, WLADIMIR F.;KASINSKI, NIKOLAI K.;TOMAL, WLADIMIR ST.
分类号
H01J27/14;H01J37/08;(IPC1-7):H01J27/14
主分类号
H01J27/14
代理机构
代理人
主权项
地址
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