TRANSPORT SYSTEM

摘要

The invention relates to a transport system for conveying products during the production process, especially integrated semiconductor products, to facilities inside a building, where they are submitted to factory processing. The invention is characterized in that the transport system and the machining facilities are separated by a floor and that the supply process from the transport system to the machining center is made through opening in said floor. Such a system is advantageously built separately from the machining center, resulting in a significant increase of the supply pace. It enables any place in the plane of the system to be reached and to be accessed any time in case of failure. It also provides with the possibility to significantly reduce the complexity of the driving software.