| 摘要 |
A microcantilever potentiometric sensor (1) utilized for detecting and measuring physical and chemical parameters in a sample of media is described. The microcantilevered spring element (3) includes at least one chemical coating (7) on a coated region, that accumulates a surface charge in response to hydrogen ions, redox potential, or ion concentrations in a sample of the media being monitored. The accumulation of surface charge on one surface of the microcantilever (3), with a differing surface charge on an opposing surface, creates a mechanical stress and a deflection of the spring element (3). One of a multitude of deflection detection methods may include the use of a laser light source (17) focused on the microcantilever (3), with a photosensitive detector (19) receiving reflected laser impulses. The microcantilevered spring element (3) is approximately 1 to 100 micro-meters long, approximately 1 to 50 micro-meters wide, and approximately 0.3 to 3.0 micro-meters thick. An accuracy of detection of deflections of the cantilever (3) is provided in the range of 0.01 nanometers of deflection. The microcantilever apparatus (1) and a method of detection of parameters require only microliters of a sample to be placed on, or near the spring element (3) surface. The method is extremely sensitive to the detection of the parameters to be measured.
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