Matrix shaped opaque low reflecting coating on glass

摘要

A glass surface with a low reflectance opaque aperture coating (12). In one example the coating has two layers, in another the coating has three layers. In a third example the coating includes a filter layer structure (36). The coating can be deposited onto the glass or an antireflective coating (14). A process is included in which the opaque coating is formed. The process includes depositing the coating on an anti reflective coating, then patterning and etching the opaque coating to define a clear aperture area. Black matrix coating for a spatial light modulator.