| 摘要 |
PROBLEM TO BE SOLVED: To obtain a ceramic sintered compact having low thermal expansibility and high Young's modulus and suitable as a member for apparatuses intended to manufacture semiconductor devices, and to provide a method for producing the above sintered compact. SOLUTION: This ceramic sintered compact is obtained by the following process: a molded form prepared by admixing cordierite powder with 0.5-10 wt.% MgO and 1-15 wt.% Al2 O3 is held at 1,000-1,200 deg.C for 1-10 h to form a solid solution where the MgO and Al2 O3 have been incorporated in the cordierite crystal, and the solid solution is then baked at 1,200-1,500 deg.C. The ceramic sintered compact thus obtained has the following characteristics: consisting mainly of cordierite crystal phase incorporated with both the MgO and Al2 O3 in excess of the stoichiometric composition ratio; thermal expansion coefficient at room temperature: <=0.5×10<-6> / deg.C; Young's modulus: >=130 GPa; relative density: >=95%. It is preferable that this sintered compact contain <=20 wt.% of rare earth elements on an oxide basis and <=30 wt.% of silicon nitride, silicon carbide, silicon oxynitride and the like. |
