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发明名称
ELECTRONIC BEAM DEFLECTOR
摘要
申请公布号
JPH11256317(A)
申请公布日期
1999.09.21
申请号
JP19980059255
申请日期
1998.03.11
申请人
HITACHI LTD;LASER ATOM SEPARATION ENG RES ASSOC OF JAPAN;HITACHI NUCLEAR ENG CO LTD
发明人
YAMAMURA TAKESHI;SANO KENJI;KAMEYAMA HIROSHI
分类号
C23C14/30;(IPC1-7):C23C14/30
主分类号
C23C14/30
代理机构
代理人
主权项
地址
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