| 摘要 |
PROBLEM TO BE SOLVED: To improve adhesiveness, uniformity and mechanical strength of a produced thin film, by applying a soln. containing at least one kind of org. acid metal salt and organometallic complex on a substrate, irradiating the coated film with UV rays and then heat treating in an atmosphere containing oxygen. SOLUTION: A soln. such as 1-butanol soln. of org. acid metal salt or organometallic complex is applied onto a substrate. As for the org. acid metal salt, metal salts of org. acid having 4 to 30 carbon atoms in one molecule, such as org. acids having benzene rings, cyclopentane rings, cyclochexane rings, C=C, C≡C, carboxyl groups, C=O, OH branched alkyl groups are used, especially, naphthenic acid salts, octylic acid salts, stearic acid salt, oleic acid salts are preferable. As for the organometallic complex, complexes having 4 to 30 carbon atoms in one molecule, such as acetylacetonate metal complex and acetyl acetone metal complex are preferably used. After the coated film is irradiated with UV rays of about 150 to 400 nm wavelength, the film is heat- treated at about 300 to 600 deg.C in air or the like.
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