| 发明名称 |
Trace metal ion reduction by Ion Exchange Pack |
| 摘要 |
The present invention provides methods for solutions having a very low level of metal ions, utilizing a specially designed Ion Exchange Pack. A method is also provided for producing photoresist composition having a very low level of metal ions from novolak resins purified in a process using such an Ion Exchange Pack.
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| 申请公布号 |
US5955570(A) |
申请公布日期 |
1999.09.21 |
| 申请号 |
US19980108817 |
申请日期 |
1998.07.01 |
| 申请人 |
CLARIANT INTERNATIONAL LTD. |
发明人 |
RAHMAN, M. DALIL;SPILLETTI, CARLO R.;COOK, MICHELLE M. |
| 分类号 |
G03F7/023;B01D15/04;B01J47/04;C08G8/04;C08G8/10;C08G8/12;G03F7/38;(IPC1-7):C08F6/00 |
主分类号 |
G03F7/023 |
| 代理机构 |
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